TY  - CHAP
AU  - Takeshi Higashiguchi
AU  - Padraig Dunne
AU  - Gerry O'Sullivan
ED  - Tetsu Mieno
Y1  - 2016-04-20
PY  - 2016
T1  - Laser-Produced Heavy Ion Plasmas as Efficient Soft X-Ray Sources
N2  - In the early twentieth century, Dr. Irving Langmuir actively studied plasma discharge and surface science. Since then, great progress has been made in the development of applications of discharges and plasmas such as discharge lamps, electric tubes, and arc welding. In relation to studies on space physics and controlled nuclear fusion, plasma physics has greatly advanced. Plasma chemistry has also progressed along with its applications in LSI fabrication technology, the chemical vapor deposition of functional films, and the production of nanomaterials. In the twenty-first century, the further development of applications of plasma physics and plasma chemistry is certainly expected. In this book, 18 chapters on the recent progress in plasma science and technology have been written by active specialists worldwide.
BT  - Plasma Science and Technology
SP  - Ch. 10
UR  - https://doi.org/10.5772/63455
DO  - 10.5772/63455
SN  - 978-953-51-2280-7
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-16
ER  -