TY - CHAP AU - Jean-François Michaud AU - Marc Portail AU - Daniel Alquier ED - Stephen E. Saddow ED - Francesco La Via Y1 - 2015-09-17 PY - 2015 T1 - 3C-SiC — From Electronic to MEMS Devices N2 - Since the production of the first commercially available blue LED in the late 1980s, silicon carbide technology has grown into a billion-dollar industry world-wide in the area of solid-state lighting and power electronics. With this in mind we organized this book to bring to the attention of those well versed in SiC technology some new developments in the field with a particular emphasis on particularly promising technologies such as SiC-based solar cells and optoelectronics. We have balanced this with the more traditional subjects such as power electronics and some new developments in the improvement of the MOS system for SiC MOSFETS. Given the importance of advanced microsystems and sensors based on SiC, we also included a review on 3C-SiC for both microsystem and electronic applications. BT - Advanced Silicon Carbide Devices and Processing SP - Ch. 2 UR - https://doi.org/10.5772/61020 DO - 10.5772/61020 SN - PB - IntechOpen CY - Rijeka Y2 - 2024-03-28 ER -