TY  - CHAP
AU  - D. Rémiens
AU  - D. Deresmes
AU  - D. Troadec
AU  - J. Costecalde
ED  - Mark Goorsky
Y1  - 2012-05-30
PY  - 2012
T1  - Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication
N2  - Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.
BT  - Ion Implantation
SP  - Ch. 13
UR  - https://doi.org/10.5772/34139
DO  - 10.5772/34139
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-20
ER  -