TY  - CHAP
AU  - Ovidio Peña-Rodríguez
AU  - José Olivares
AU  - Mercedes Carrascosa
AU  - Ángel García-Cabañes
AU  - Antonio Rivera
AU  - Fernando Agulló-López
ED  - Mark Goorsky
Y1  - 2012-05-30
PY  - 2012
T1  - Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review
N2  - Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.
BT  - Ion Implantation
SP  - Ch. 12
UR  - https://doi.org/10.5772/35265
DO  - 10.5772/35265
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-05-11
ER  -