TY - CHAP AU - Faieza Abdul Aziz AU - Izham Hazizi Ahmad AU - Norzima Zulkifli AU - Rosnah Mohd. Yusuff ED - Faieza Abdul Aziz Y1 - 2012-05-16 PY - 2012 T1 - Particle Reduction at Metal Deposition Process in Wafer Fabrication N2 - This book attempts to bring together selected recent advances, tools, application and new ideas in manufacturing systems. Manufacturing system comprise of equipment, products, people, information, control and support functions for the competitive development to satisfy market needs. It provides a comprehensive collection of papers on the latest fundamental and applied industrial research. The book will be of great interest to those involved in manufacturing engineering, systems and management and those involved in manufacturing research. BT - Manufacturing System SP - Ch. 1 UR - https://doi.org/10.5772/38239 DO - 10.5772/38239 SN - PB - IntechOpen CY - Rijeka Y2 - 2024-03-29 ER -