TY - CHAP AU - Z. Chen AU - L.W. Su AU - J.Y. Shi AU - X.L. Wang AU - C.L. Tang AU - P. Gao ED - Victor Bellitto Y1 - 2012-03-23 PY - 2012 T1 - AFM Application in III-Nitride Materials and Devices N2 - With the advent of the atomic force microscope (AFM) came an extremely valuable analytical resource and technique useful for the qualitative and quantitative surface analysis with sub-nanometer resolution. In addition, samples studied with an AFM do not require any special pretreatments that may alter or damage the sample and permits a three dimensional investigation of the surface. This book presents a collection of current research from scientists throughout the world that employ atomic force microscopy in their investigations. The technique has become widely accepted and used in obtaining valuable data in a wide variety of fields. It is impressive to see how, in a short time period since its development in 1986, it has proliferated and found many uses throughout manufacturing, research and development. BT - Atomic Force Microscopy SP - Ch. 9 UR - https://doi.org/10.5772/37527 DO - 10.5772/37527 SN - PB - IntechOpen CY - Rijeka Y2 - 2024-04-25 ER -