TY - CHAP AU - Sachiko Ono AU - Hidetaka Asoh ED - Yen-Hsun Su Y1 - 2012-02-01 PY - 2012 T1 - Nano/Micro-Patterning of Semiconductors by Site Selective Chemical Etching Using Noble Metals as Catalyst N2 - This book provides a broad spectrum of insights into the optical principle, resource, fabrication, nanoscience, and nanotechnology of noble metal. It also looks at the advanced implementation of noble metal in the field of nanoscale materials, catalysts and biosystem. This book is ideal not only for scientific researchers but also as a reference for professionals in material science, engineering, nonascience and plasmonics. BT - Noble Metals SP - Ch. 11 UR - https://doi.org/10.5772/34387 DO - 10.5772/34387 SN - PB - IntechOpen CY - Rijeka Y2 - 2024-03-29 ER -