TY  - CHAP
AU  - Salvador Mendoza-Acevedo
AU  - Mario Alfredo Reyes-Barranca
AU  - Edgar Norman Vázquez-Acosta
AU  - José Antonio Moreno-Cadenas
AU  - José Luis González-Vidal
ED  - Mojtaba Kahrizi
Y1  - 2012-02-03
PY  - 2012
T1  - Release Optimization of Suspended Membranes in MEMS
N2  - Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter  gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
BT  - Micromachining Techniques for Fabrication of Micro and Nano Structures
SP  - Ch. 9
UR  - https://doi.org/10.5772/30909
DO  - 10.5772/30909
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-26
ER  -