TY  - CHAP
AU  - Tai-Chang Chen
AU  - Robert Bruce Darling
ED  - Mojtaba Kahrizi
Y1  - 2012-02-03
PY  - 2012
T1  - Fundamentals of Laser Ablation of the Materials Used in Microfluiducs
N2  - Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter  gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
BT  - Micromachining Techniques for Fabrication of Micro and Nano Structures
SP  - Ch. 3
UR  - https://doi.org/10.5772/30737
DO  - 10.5772/30737
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-19
ER  -