TY  - CHAP
AU  - Igor L. Baginsky
AU  - Edward G. Kostsov
ED  - Mickaël Lallart
Y1  - 2011-08-23
PY  - 2011
T1  - MEMS Based on Thin Ferroelectric Layers
N2  - Ferroelectric materials have been and still are widely used in many applications, that have moved from sonar towards breakthrough technologies such as memories or optical devices. This book is a part of a four volume collection (covering material aspects, physical effects, characterization and modeling, and applications) and focuses on the application of ferroelectric devices to innovative systems. In particular, the use of these materials as varying capacitors, gyroscope, acoustics sensors and actuators, microgenerators and memory devices will be exposed, providing an up-to-date review of recent scientific findings and recent advances in the field of ferroelectric devices.
BT  - Ferroelectrics
SP  - Ch. 2
UR  - https://doi.org/10.5772/17539
DO  - 10.5772/17539
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-23
ER  -