TY  - CHAP
AU  - Igor K. Igumenov
AU  - Tamara V. Basova
AU  - Vladimir R. Belosludov
ED  - Mizutani Tadashi
Y1  - 2011-01-14
PY  - 2011
T1  - Volatile Precursors for Films Deposition: Vapor Pressure, Structure and Thermodynamics
N2  - Progress of thermodynamics has been stimulated by the findings of a variety of fields of science and technology. The principles of thermodynamics are so general that the application is widespread to such fields as solid state physics, chemistry, biology, astronomical science, materials science, and chemical engineering. The contents of this book should be of help to many scientists and engineers.
BT  - Application of Thermodynamics to Biological and Materials Science
SP  - Ch. 20
UR  - https://doi.org/10.5772/13356
DO  - 10.5772/13356
SN  - 
PB  - IntechOpen
CY  - Rijeka
Y2  - 2024-04-26
ER  -