@incollection{Sunami10, author = {Hideo Sunami}, title = {Dimension Increase in Metal-Oxide-Semiconductor Memories and Transistors}, booktitle = {Advances in Solid State Circuit Technologies}, publisher = {IntechOpen}, address = {Rijeka}, year = {2010}, editor = {Paul K Chu}, chapter = {15}, doi = {10.5772/8638}, url = {https://doi.org/10.5772/8638} }