@incollection{Shearn10,
author = {Michael Shearn and Xiankai Sun and M. David Henry and Amnon Yariv and Axel Scherer},
title = {Advanced Plasma Processing: Etching, Deposition, and Wafer Bonding Techniques for Semiconductor Applications},
booktitle = {Semiconductor Technologies},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Jan Grym},
chapter = {5},
doi = {10.5772/8564},
url = {https://doi.org/10.5772/8564}
}