@incollection{Prazmowska10,
author = {Ryszard Korbutowicz and Joanna Prazmowska},
title = {Wet Thermal Oxidation of GaAs and GaN},
booktitle = {Semiconductor Technologies},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Jan Grym},
chapter = {6},
doi = {10.5772/8555},
url = {https://doi.org/10.5772/8555}
}