@incollection{Choi10,
author = {Wai Yuen Fu and Hoi Wai Choi},
title = {Nanosphere Lithography for Nitride Semiconductors},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {30},
doi = {10.5772/8196},
url = {https://doi.org/10.5772/8196}
}