@incollection{Mohamed10, author = {Maan M. Alkaisi and Khairudin Mohamed}, title = {Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography}, booktitle = {Lithography}, publisher = {IntechOpen}, address = {Rijeka}, year = {2010}, editor = {Michael Wang}, chapter = {28}, doi = {10.5772/8194}, url = {https://doi.org/10.5772/8194} }