@incollection{Unno10,
author = {Jun Taniguchi and Noriyuki Unno},
title = {Three Dimensional Nanoimprint Lithography Using Inorganic Electron Beam Resist},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {27},
doi = {10.5772/8193},
url = {https://doi.org/10.5772/8193}
}