@incollection{Yasuda10,
author = {Masaaki Yasuda and Kazuhiro Tada and Yoshihiko Hirai},
title = {Molecular Dynamics Study on Mold and Pattern Breakages in Nanoimprint Lithography},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {26},
doi = {10.5772/8192},
url = {https://doi.org/10.5772/8192}
}