@incollection{Mekaru10,
author = {Harutaka Mekaru},
title = {Effect of Applying Ultrasonic Vibration in Hot Embossing and Nanoimprint},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {25},
doi = {10.5772/8191},
url = {https://doi.org/10.5772/8191}
}