@incollection{Yoon10,
author = {Tae-Ho Yoon and Lan-Young Hong and Dong-Pyo Kim},
title = {Fabrication of SiC-based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Softlithography Techniques},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {21},
doi = {10.5772/8187},
url = {https://doi.org/10.5772/8187}
}