@incollection{Kang10, author = {Shin-Won Kang}, title = {Application of Soft Lithography for Nano Functional Devices}, booktitle = {Lithography}, publisher = {IntechOpen}, address = {Rijeka}, year = {2010}, editor = {Michael Wang}, chapter = {20}, doi = {10.5772/8186}, url = {https://doi.org/10.5772/8186} }