@incollection{Mladenov10,
author = {Katia Vutova and Georgi Mladenov},
title = {Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 1: Exposure Modeling at Electron and Ion Beam Lithography},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {17},
doi = {10.5772/8183},
url = {https://doi.org/10.5772/8183}
}