@incollection{Mohammad10,
author = {Mohammad A. Mohammad and Taras Fito and Jiang Chen and Steven Buswell and Mirwais Aktary and Steven K. Dew and Maria Stepanova},
title = {The Interdependence of Exposure and Development Conditions when Optimizing Low-Energy EBL for Nano-Scale Resolution},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {16},
doi = {10.5772/8182},
url = {https://doi.org/10.5772/8182}
}