@incollection{Lee10,
author = {Do-Kyun Woo and Sun-Kyu Lee},
title = {Independent-Exposure Method in Electron-Beam Lithography},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {15},
doi = {10.5772/8181},
url = {https://doi.org/10.5772/8181}
}