@incollection{Okano10,
author = {Masato Okano},
title = {Optimal Design and Fabrication of Fine Diffractive Optical Elements Using Proximity Correction with Electron-Beam Lithography},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {14},
doi = {10.5772/8180},
url = {https://doi.org/10.5772/8180}
}