@incollection{Wu10,
author = {Cen Shawn Wu and Yoshiyuki Makiuchi and ChiiDong Chen},
title = {High-energy Electron Beam Lithography for Nanoscale Fabrication},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {13},
doi = {10.5772/8179},
url = {https://doi.org/10.5772/8179}
}