@incollection{Wang10,
author = {Linjun Wang and Jian Huang and Ke Tang and Yiben Xia},
title = {Nano-Crystalline Diamond Films for X-ray Lithography Mask},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {12},
doi = {10.5772/8178},
url = {https://doi.org/10.5772/8178}
}