@incollection{White10,
author = {White and Dunne and and O’Sullivan},
title = {Steady-State and Time-Dependent LPP Modeling},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {11},
doi = {10.5772/8177},
url = {https://doi.org/10.5772/8177}
}