@incollection{Braic10,
author = {Mariana Braic and Mihai Balaceanu and Viorel Braic},
title = {Grazing Incidence Mirrors for EUV Lithography},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {10},
doi = {10.5772/8176},
url = {https://doi.org/10.5772/8176}
}