@incollection{Endo10,
author = {Akira Endo},
title = {CO<sub>2</sub> Laser Produced Tin Plasma Light Source as the Solution for EUV Lithography},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {9},
doi = {10.5772/8175},
url = {https://doi.org/10.5772/8175}
}