@incollection{Kim10,
author = {Sang-Kon Kim},
title = {A Method for Optical Proximity Correction of Thermal Processes: Orthogonal Functional Method},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {8},
doi = {10.5772/8174},
url = {https://doi.org/10.5772/8174}
}