@incollection{Nosato10,
author = {Hirokazu Nosato and Hidenori Sakanashi and Masahiro Murakawa and Tetsuya Higuchi},
title = {Improving the Efficiency of Pattern Extraction for Character Projection Lithography using OPC Optimization},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {5},
doi = {10.5772/8171},
url = {https://doi.org/10.5772/8171}
}