@incollection{Hirata10,
author = {Hiroaki Nishiyama and Yoshinori Hirata},
title = {Femtosecond Laser Nonlinear Lithography},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {4},
doi = {10.5772/8170},
url = {https://doi.org/10.5772/8170}
}