@incollection{Jami10,
author = {K. Jami and I. Pollentier and S. Vedula and G. Blumenstock},
title = {Influence of Immersion Lithography on Wafer Edge Defectivity},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {3},
doi = {10.5772/8169},
url = {https://doi.org/10.5772/8169}
}