@incollection{Rhee10,
author = {Hyug-Gyo Rhee},
title = {Direct Laser Lithography and Its Applications},
booktitle = {Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Michael Wang},
chapter = {1},
doi = {10.5772/8167},
url = {https://doi.org/10.5772/8167}
}