@incollection{Kim08,
author = {HyungTae Kim and HaeJeong Yang and SungChul Kim},
title = {The Wafer Alignment Algorithm Regardless of Rotational Center},
booktitle = {New Approaches in Automation and Robotics},
publisher = {IntechOpen},
address = {Rijeka},
year = {2008},
editor = {Harald Aschemann},
chapter = {22},
doi = {10.5772/5406},
url = {https://doi.org/10.5772/5406}
}