@incollection{Goray21,
author = {Leonid I. Goray},
title = {Diffraction Grating Groove Metrology Using AFM & STM},
booktitle = {Recent Developments in Atomic Force Microscopy and Raman Spectroscopy for Materials Characterization},
publisher = {IntechOpen},
address = {Rijeka},
year = {2021},
editor = {Chandra Shakher Pathak and Samir Kumar},
chapter = {3},
doi = {10.5772/intechopen.97257},
url = {https://doi.org/10.5772/intechopen.97257}
}