@incollection{M.21,
author = {Sandhya K. M. and Litty Thomas Manamel and Bikas C. Das},
title = {Doping of Semiconductors at Nanoscale with Microwave Heating (Overview)},
booktitle = {Microwave Heating},
publisher = {IntechOpen},
address = {Rijeka},
year = {2021},
editor = {Gennadiy I. Churyumov},
chapter = {4},
doi = {10.5772/intechopen.95558},
url = {https://doi.org/10.5772/intechopen.95558}
}