@incollection{Yoon20,
author = {Jun-Sik Yoon and Jinsu Jeong and Seunghwan Lee and Junjong Lee and Rock-Hyun Baek},
title = {Gate-All-Around FETs: Nanowire and Nanosheet Structure},
booktitle = {Nanowires},
publisher = {IntechOpen},
address = {Rijeka},
year = {2020},
editor = {Xihong Peng},
chapter = {9},
doi = {10.5772/intechopen.94060},
url = {https://doi.org/10.5772/intechopen.94060}
}