@incollection{Pachkawade20,
author = {Vinayak Pachkawade},
title = {Ultra-Precise MEMS Based Bio-Sensors},
booktitle = {Biosensors},
publisher = {IntechOpen},
address = {Rijeka},
year = {2020},
editor = {Luis Jesús Villarreal-Gómez and Ana Leticia Iglesias},
chapter = {6},
doi = {10.5772/intechopen.93931},
url = {https://doi.org/10.5772/intechopen.93931}
}