@incollection{Chang20, author = {Kuo-Chi Chang and Kai-Chun Chu and Hsiao-Chuan Wang and Yuh-Chung Lin and Tsui-Lien Hsu and Yu-Wen Zhou}, title = {Study on IoT and Big Data Analysis of 12” 7 nm Advanced Furnace Process Exhaust Gas Leakage}, booktitle = {Linked Open Data}, publisher = {IntechOpen}, address = {Rijeka}, year = {2020}, editor = {Kingsley Okoye}, chapter = {5}, doi = {10.5772/intechopen.92849}, url = {https://doi.org/10.5772/intechopen.92849} }