@incollection{Hattori20,
author = {Azusa N. Hattori and Ken Hattori},
title = {Creation and Evaluation of Atomically Ordered Side- and Facet-Surface Structures of Three-Dimensional Silicon Nano-Architectures},
booktitle = {21st Century Surface Science},
publisher = {IntechOpen},
address = {Rijeka},
year = {2020},
editor = {Phuong Pham and Pratibha Goel and Samir Kumar and Kavita Yadav},
chapter = {6},
doi = {10.5772/intechopen.92860},
url = {https://doi.org/10.5772/intechopen.92860}
}