@incollection{Knick20,
author = {Cory R. Knick},
title = {Fabrication and Characterization of Nanoscale Shape Memory Alloy MEMS Actuators},
booktitle = {Advanced Functional Materials},
publisher = {IntechOpen},
address = {Rijeka},
year = {2020},
editor = {Nevin Tasaltin and Paul Sunday Nnamchi and Safaa Saud},
chapter = {2},
doi = {10.5772/intechopen.92762},
url = {https://doi.org/10.5772/intechopen.92762}
}