@incollection{Knick20, author = {Cory R. Knick}, title = {Optimization of MEMS Actuator Driven by Shape Memory Alloy Thin Film Phase Change}, booktitle = {Advanced Functional Materials}, publisher = {IntechOpen}, address = {Rijeka}, year = {2020}, editor = {Nevin Tasaltin and Paul Sunday Nnamchi and Safaa Saud}, chapter = {3}, doi = {10.5772/intechopen.92393}, url = {https://doi.org/10.5772/intechopen.92393} }