@incollection{Liu20, author = {Hong Liu}, title = {Growth Kinetics of Thin Film Epitaxy}, booktitle = {21st Century Surface Science}, publisher = {IntechOpen}, address = {Rijeka}, year = {2020}, editor = {Phuong Pham and Pratibha Goel and Samir Kumar and Kavita Yadav}, chapter = {1}, doi = {10.5772/intechopen.91224}, url = {https://doi.org/10.5772/intechopen.91224} }