@incollection{Ozaki20, author = {Nobuhiko Ozaki and Kazumasa Ishida and Tsuyoshi Nishi and Hirotaka Ohsato and Eiichiro Watanabe and Naoki Ikeda and Yoshimasa Sugimoto}, title = {OCT with a Visible Broadband Light Source Applied to High-Resolution Nondestructive Inspection for Semiconductor Optical Devices}, booktitle = {Optical Coherence Tomography and Its Non-medical Applications}, publisher = {IntechOpen}, address = {Rijeka}, year = {2020}, editor = {Michael R. Wang}, chapter = {10}, doi = {10.5772/intechopen.90117}, url = {https://doi.org/10.5772/intechopen.90117} }