@incollection{Gangopadhyay20,
author = {Subhashis Gangopadhyay},
title = {Crystalline Silicon Nitride Films on Si(111): Growth Mechanism, Surface Structure and Chemistry down to Atomic Scale},
booktitle = {Multilayer Thin Films},
publisher = {IntechOpen},
address = {Rijeka},
year = {2020},
editor = {Sukumar Basu},
chapter = {2},
doi = {10.5772/intechopen.89412},
url = {https://doi.org/10.5772/intechopen.89412}
}