@incollection{Tsvetkova20, author = {Tania Tsvetkova}, title = {Nanoscale Optical Patterning of Amorphous Silicon Carbide for High-Density Data Archiving}, booktitle = {Multilayer Thin Films}, publisher = {IntechOpen}, address = {Rijeka}, year = {2020}, editor = {Sukumar Basu}, chapter = {7}, doi = {10.5772/intechopen.88750}, url = {https://doi.org/10.5772/intechopen.88750} }