@incollection{Mukhiya19,
author = {S. Santosh Kumar and Ravindra Mukhiya},
title = {CMOS Compatible Wet Bulk Micromachining for MEMS Applications},
booktitle = {Micromachining},
publisher = {IntechOpen},
address = {Rijeka},
year = {2019},
editor = {Zdravko Stanimirović and Ivanka Stanimirović},
chapter = {4},
doi = {10.5772/intechopen.88487},
url = {https://doi.org/10.5772/intechopen.88487}
}