@incollection{Mamedov20,
author = {Huseyn M. Mamedov},
title = {Nanostructured Silicon Sensors},
booktitle = {Multilayer Thin Films},
publisher = {IntechOpen},
address = {Rijeka},
year = {2020},
editor = {Sukumar Basu},
chapter = {3},
doi = {10.5772/intechopen.88316},
url = {https://doi.org/10.5772/intechopen.88316}
}